| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic thin film which has high saturation magnetic flux density and small coercive force and can prevent its magnetic permeability from dropping, by suppressing the increase in anisotropic magnetic field accompanying the increase in oxygen concentration, and with which the characteristics of a thin-film magnetic head can be improved. SOLUTION: This soft magnetic thin film has a composition expressed by the chemical formula Fea .Cob .Mc .Cd .Oe , and in the formula, the M denotes at least one kind of element selected from among Ti, V, Ta, Nb, Cr, Mo, W, Cu, Zn, Ga, Al, Zr, Y, Si, and B, and the a, b, c, d, and e atomic percentages are set so as to satisfy 51.0<=a<=95.0, 5.0<=b<=49.0, 0.5<=c<=15.0, 0.5<=d<=10.0, 0.5<=e<=20.0, and a+b+c+d+e=100, respectively. |
