| 发明名称 |
Interferometer and interferance measurement method |
| 摘要 |
There is provided an interferometer for measuring a surface shape of an optical element using interference, including a reference wave-front deformation system for deforming a wave front of reference light.
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| 申请公布号 |
US2002176090(A1) |
申请公布日期 |
2002.11.28 |
| 申请号 |
US20020116924 |
申请日期 |
2002.04.05 |
| 申请人 |
OHSAKI YUMIKO;SUZUKI AKIYOSHI;SAITOH KENJI |
发明人 |
OHSAKI YUMIKO;SUZUKI AKIYOSHI;SAITOH KENJI |
| 分类号 |
G01B11/24;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/24 |
| 代理机构 |
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