Handling device used in clean rooms comprises sealing devices between a basic body and the surface of a section of a moving element extending from the basic body

摘要

Handling device (10) used in clean rooms comprises sealing devices (44) between a basic body (12) and the surface of a section of a moving element (16, 18) extending from the basic body. The sealing devices allow gas from a clean room to enter a hollow space (42) when the hollow space is increased on displacement of the moving element and prevent gas from the hollow space entering the clean room when the hollow space is reduced. The hollow space is connected to the outer side of the basic body via a waste gas channel (46). The waste gas channel can be connected to a line leading out of the clean room. Blocking devices (48) regulating the flow resistance in the waste gas channel and/or the line prevent gas entering the hollow space when the hollow space is increased on displacement of the moving element and allow gas to flow out of the hollow space via the waste gas channel/line when the hollow space is reduced. An Independent claim is also included for a process for operating the handling device.