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经营范围
发明名称
Vorrichtung mit geladenem Teilchenstrahl
摘要
申请公布号
DE4408523(C2)
申请公布日期
2002.11.28
申请号
DE19944408523
申请日期
1994.03.14
申请人
AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY, TOKIO/TOKYO
发明人
OKAYAMA, SHIGEO;OGURA, MUTSUO;KOMURO, MASANORI;HIROSHIMA, HIROSHI
分类号
H01J37/18;H01J37/20;H01J37/28;H01J37/305;H01L21/027;(IPC1-7):H01J37/20
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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