| 发明名称 |
CYCLIC ERROR REDUCTION IN AVERAGE INTERFEROMETRIC POSITION MEASUREMENTS |
| 摘要 |
An initial interferometric position measurement of the stage (120) is averaged with at least one additional measurement corresponding to a displacement of the stage from its initial position. The displacements are selected to reduce the overall cyclic error contribution to an average position measurement. |
| 申请公布号 |
WO02073122(A3) |
申请公布日期 |
2002.11.28 |
| 申请号 |
WO2002US07446 |
申请日期 |
2002.03.13 |
| 申请人 |
ZYGO CORPORATION;HILL, HENRY, A. |
发明人 |
HILL, HENRY, A. |
| 分类号 |
G01B9/02;G01B11/00;G03F7/20;H01L21/027 |
主分类号 |
G01B9/02 |
| 代理机构 |
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代理人 |
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