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发明名称
TWO ETCHANT ETCH METHOD
摘要
申请公布号
EP1259980(A1)
申请公布日期
2002.11.27
申请号
EP20010913007
申请日期
2001.02.22
申请人
APPLIED MATERIALS, INC.
发明人
KHAN, ANISUL;KUMAR, AJAY;CHINN, JEFFREY, D.;PODLESNIK, DRAGAN
分类号
B81C1/00;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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