CRYSTAL ANGULAR SPEED SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a small-sized crystal angular speed sensor having high sensitivity with respect to angular speed. SOLUTION: A groove is provided on a center part sandwiching the neutral line of a tuning fork arm by a tuning fork crystal vibrator vibrating a bending vibrating mode, and a vibrator drive electrode and an angular speed detection electrode are arranged in the inside of the groove.