| 摘要 |
PROBLEM TO BE SOLVED: To provide a stocker capable of demonstrating the clean room function in any storage part by allowing the supplied clean air to be uniformly distributed to any storage part in any stage of the vertical direction. SOLUTION: In the stocker comprising a storage shelf 2 having a plurality of vertically stacked storage parts 2a for loading cassettes 3 for wafers and a back side wall 10 located on the back side to the storage shelf 2, and introducing the clean air supplied downwardly from a top wall 9 into a space part 21 between the storage shelf 2 and the back side wall 10 via an air inlet 12, a distribution hole 20 for supplying air into the storage parts 2a is opened in a back side 17 of the storage shelf 2, and a straightening means 22 for guiding the air flowing downwardly through the space part 21 from the air inlet 12 toward the side of the storage shelf 2.
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