METHOD FOR MEASURING TILT DIFFERENCE OF PLATEN IN ION IMPLANT SYSTEM AND APPARATUS FOR THE SAME

摘要

PURPOSE: A method for measuring tilt difference of platen in an ion implant system and an apparatus for the same are provided to measure tilt difference of a platen in an ion implant system. CONSTITUTION: The ion implant system comprises a guide plate and a measurement unit. A contact part(20) is contacted with a part for measuring a distance to the lower surface. The contact part(20) comprises a main body(22) attached on the upper surface. A contact tip(24) comprises a supporter(26) to move horizontally to the main body(22).