发明名称 INSTRUMENT FOR MEASURING ILLUMINANCE, AND EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To measure information as to illuminance while saving space, without increasing the cost. SOLUTION: An emitted beam is received to measure the information about the illuminance of the beam. This instrument is provided with a photoreceiver 21 for photoreceiving the beam, a specifying device 23 for specifying a photoreceiving area for the beam emitted to the photoreceiver 21 in plural ranges, and a switching device for driving the specifying device 23 to switch the range of the photoreceiving area.
申请公布号 JP2002340667(A) 申请公布日期 2002.11.27
申请号 JP20010145324 申请日期 2001.05.15
申请人 NIKON CORP 发明人 SASAMOTO MASAKI
分类号 G01J1/02;G03F7/20;H01L21/027;(IPC1-7):G01J1/02 主分类号 G01J1/02
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