| 摘要 |
PROBLEM TO BE SOLVED: To contrive reliability improvement of an inspection device by self- diagnosing whether all probes come back to non-detection positions of the connector pins in a retreat position separated from the connector pins. SOLUTION: While probe cases 1 are at a treat position, the probe 3 is at a first slide position. While a probe case 1 is at an inspection position and the probe 3 is into contact with a connector pin 41, the probe 3 is slid to a second slide position. First detection means 4b, 5b detect that the all probes 3 are at the first slide position. Second detection means 4a, 5a detect that the all probes 3 are at a second slide position. At first, the first detection means 4b, 5b detect that the all probes 3 are at the first slide position, and the second detection means 4a, 5a detect that the probes 3 which are at the first slide position are brought into contact with the connector pins and slid to the second slide position. Misjudgment is prevented.
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