| 摘要 |
PROBLEM TO BE SOLVED: To improve abrasion resistance of a film to form an insulation layer for preventing deviated abrasion of a thin film magnetic head to solve the problem that the deviated abrasion is generated on a sliding surface of the magnetic head and heavy losses of electromagnetic conversion characteristics may occur in the case the thin film magnetic head is used for a tape. SOLUTION: The thin film magnetic head is constructed by forming a magnetic circuit layer and an insulation layer for electromagnetic conversion on a substrate. The deviated abrasion is prevented by hardening the insulation layer with addition of chromium, titanium, silicon or the like and by disposing a hard film composed of aluminum nitride, diamond-like carbon, tetrahedral amorphous carbon or the like between the insulation layer and a metal layer or between the substrate and the insulation layer. Also the deviated abrasion is prevented by forming a thin film layer compose of one out of chromium, titanium and silicon as an intermediate layer before forming the hard film so as to improve adherence and to form the thick hard film.
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