| 摘要 |
PURPOSE: A locking device of a container for keeping a carrier including semiconductor wafers is provided to perform smoothly a production process by preventing a stopping effect of production equipment due to particles. CONSTITUTION: A pod(20) is formed with a pod plate and a pod cover. A carrier is loaded on the pod plate. The pod cover is coupled with the pod plate. A flange(26) is formed at a lower edge portion of the pod cover. The flange(26) is combined with a projected section(42). The pod(20) is loaded on a pod loading plate(30). A pod guide(28) is installed in the pod loading plate(30). A locking device(40) is installed in the inside of the pod guide(28). The locking device(40) is formed with the projected section(42), a motor(44), a signal bar(48), and a plurality of approach sensors(50a,50b). The motor(44) is used for moving the projected section(42), horizontally. The signal bar(48) is installed at a rotary shaft(46) of the motor(44). The approach sensors(50a,50b) are used for detecting signals transmitted to the signal bar(48).
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