WAFER MAP DISPLAY APPARATUS AND METHOD FOR SEMICONDUCTOR TEST SYSTEM

摘要

A wafer map display apparatus and method (Fig. 4) for displaying an entire image (W) of a semiconductor wafer (W) and IC chips (M) therein with an optimal display size within a specified window size (Fig. 2A-Fig. 2F). The water map display apparatus acquires window size information for displaying a wafer map of a semiconductor wafer under test (Fig. 4) in a specified window, and calculates a chip display size every time when test results and XY address data of an IC chip that has been tested is received with use of all of XY address data of IC chips that have been tested (18), and renews the wafer map display based on the newest chip display size (20), thereby displaying all of the IC chips that have been tested and an overall semiconductor wafer under test with an optimum size within the specified window (Fig. 2A-Fig. 2E).