发明名称 |
In-situ of dichloroethene and NH3 in an H2O steam based oxidation system to provide a source of chlorine |
摘要 |
A method of using dichloroethene and ammonia to provide chlorine and nitrogen during the growth of an in-situ hardened gate dielectric. The method provides a gaseous source of gettering agent and a gaseous source of dielectric strengthening agent that are compatible with each other and can be used during the formation of in-situ hardened dielectric or the strengthening of an already formed dielectric.
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申请公布号 |
US2002173122(A1) |
申请公布日期 |
2002.11.21 |
申请号 |
US20020193597 |
申请日期 |
2002.07.10 |
申请人 |
POWELL DON CARL |
发明人 |
POWELL DON CARL |
分类号 |
H01L21/28;H01L29/51;(IPC1-7):H01L21/322 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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