METHOD FOR PRODUCING A FERROELECTRIC LAYER,申请号EP20010911688-传众专利搜索

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发明名称	METHOD FOR PRODUCING A FERROELECTRIC LAYER
摘要
申请公布号	EP1258036(A1)	申请公布日期	2002.11.20
申请号	EP20010911688	申请日期	2001.02.22
申请人	INFINEON TECHNOLOGIES AG	发明人	CERVA, HANS;HINTERMAIER, FRANK;SCHINDLER, GUENTHER;WINTERAUER, FRANZ;HARTNER, WALTER;HOEPFNER, JOACHIM;WEINRICH, VOLKER
分类号	H01L21/02;H01L21/314;H01L21/316;H01L21/8246;H01L27/115;(IPC1-7):H01L21/316	主分类号	H01L21/02
代理机构		代理人
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