发明名称 |
ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME |
摘要 |
<p>It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al2O3 ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al2O3 ceramic formed on the electrode layer as a topcoat. <IMAGE></p> |
申请公布号 |
EP1258918(A1) |
申请公布日期 |
2002.11.20 |
申请号 |
EP20010901396 |
申请日期 |
2001.01.17 |
申请人 |
TOCALO CO. LTD. |
发明人 |
HARADA, YOSHIO;TAKEUCHI, JUNICHI;TOGOE, KENICHIRO |
分类号 |
B23Q3/15;B23Q3/154;B25J15/06;H01L21/683;(IPC1-7):H01L21/68 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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