发明名称 |
Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system |
摘要 |
Apparatus for measuring wafer support assembly temperature in a semiconductor wafer processing system. The apparatus is a modular plug that is mounted to the support assembly. The plug contains a photoluminescent material that exhibits a decay in luminescence after an excitement which is indicative of the temperature of the support assembly.
|
申请公布号 |
US6481886(B1) |
申请公布日期 |
2002.11.19 |
申请号 |
US20000513726 |
申请日期 |
2000.02.24 |
申请人 |
|
发明人 |
|
分类号 |
G01K11/32;H01J37/32;H01L21/00;(IPC1-7):G01K1/14;G01K1/16;G01K11/20;G02B6/122;G02B6/36;H01J63/04 |
主分类号 |
G01K11/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|