Apparatus for automatically measuring the resistivity of semiconductor boules using the method of four probes,申请号AU20020308611-传众专利搜索

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发明名称	Apparatus for automatically measuring the resistivity of semiconductor boules using the method of four probes
摘要
申请公布号	AU2002308611(A1)	申请公布日期	2002.11.18
申请号	AU20020308611	申请日期	2002.05.03
申请人	G.T. EQUIPMENT TECHNOLOGIES, INC.	发明人	L. DOLAN ROMAN;GLEN ALAN BURGESS;MOHAN CHANDRA;DAVID DARLING;CARL CARTIER
分类号	G01N27/04;G01R27/08;G01R31/26;(IPC1-7):G01R31/02	主分类号	G01N27/04
代理机构		代理人
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