Tester, a test system, and a testing method for a semiconductor integrated circuit

摘要

An input signal for testing a device is stored in a first storage located on a test board. An expectation value signal output by the device, when it operates normally, in response to the input signal is stored in a second storage located on the same test board. The input signal from the first storage is supplied to the device based on an instruction from a tester body. The device outputs an output signal in response to input of this input signal. This signal is sent to a comparator. The comparator compares the signal output from the device with the expectation value signal stored in and output from the second storage.