| 摘要 |
A micromachined design and method with inherent disturbance-rejection capabilities is based on increasing the degrees-of-freedom (DOF) of the oscillatory system by the use of two independently oscillating proof masses. Utilizing dynamical amplification in the 4-degrees-of-freedom system, inherent disturbance rejection is achieved, providing reduced sensitivity to structural and thermal parameter fluctuations and damping changes over the operating time of the device. In the proposed system, the first mass is forced to oscillate in the drive direction, and the response of the second mass in the orthogonal direction is sensed. The response has two resonant peaks and a flat region between peaks. Operation is in the flat region, where the gain is insensitive to frequency fluctuations. An over 15 times increase in the bandwidth of the system is achieved due to the use of the proposed architecture. In addition, the gain in the operation region has low sensitivity to damping changes. Consequently, by utilizing the disturbance-rejection capability of the dynamical system, improved robustness is achieved, which can relax tight fabrication tolerances and packaging requirements and thus result in reducing production cost of micromachined methods. |
