HIGH POWER GAS DISCHARGE LASER WITH HELIUM PURGED LINE NARROWING UNIT,申请号IL20000149675-传众专利搜索

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发明名称	HIGH POWER GAS DISCHARGE LASER WITH HELIUM PURGED LINE NARROWING UNIT
摘要
申请公布号	IL149675(D0)	申请公布日期	2002.11.10
申请号	IL20000149675	申请日期	2000.11.22
申请人	CYMER, INC.	发明人
分类号	H01S3/03;G03F7/20;H01S3/036;H01S3/04;H01S3/041;H01S3/1055;H01S3/225;(IPC1-7):H01S	主分类号	H01S3/03
代理机构		代理人
主权项
地址

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