SURFACE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface inspection device detectable of reflection light with sufficient sensitivity in measuring reflectivity by irradiating light to a reflection mirror formed with a part of a rotary ellipse surface being a surface to be measured and detecting the reflection light. SOLUTION: The end surface of a light guide means 16 for irradiation on the surface to be measured is placed at the more distant focus of the two from the surface to be measured and a light guide means 17 for detection on the surface to be measured is formed around the end surface of the light guide means 16 for irradiation on the surface to be measured. By this, the reflection light can be sufficiently introduced in the detector 14 and this can detect the reflection light detected with sufficient detection sensitivity.