发明名称 PELLICLE HOUSING CONTAINER
摘要 <p>PROBLEM TO BE SOLVED: To provide a pellicle housing container which is capable of housing pellicles in a stable state and is more particularly capable of housing plural sheets of the pellicles in a parallel state. SOLUTION: A tray 6 of the pellicle housing container B consisting of the tray 6 made of plastic and a cap 7 capable of covering this tray 6 is provided with four pieces of pellicle holding sections 8a, 8b, 8c and 8d capable of individually housing the pellicles A into the tray 6. These pellicle holding sections 8a, 8b, 8c and 8d are respectively composed of plural positioning projections 9 which can abut on the outer peripheral surface of a pellicle fame 1 erected and projectingly disposed from the inner base surface 6a of the ray 6.</p>
申请公布号 JP2002323753(A) 申请公布日期 2002.11.08
申请号 JP20010126911 申请日期 2001.04.25
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 HATADA YOSHIKATSU
分类号 B65D85/86;G03F1/62;G03F1/66;H01L21/027;(IPC1-7):G03F1/14 主分类号 B65D85/86
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