| 摘要 |
PROBLEM TO BE SOLVED: To provide a high precision movement mechanism in simple construction and capable of reducing the manufacturing cost. SOLUTION: This high precision movement mechanism is provided with a minute movement mechanism 20 rapidly and finely displacing a shape tracking sensor 10 in the surface height direction of a workpiece W, a rough movement mechanism 30 having a movable part 31 displacing the minute movement mechanism 20 and a fixing part 32 supporting the movable part 31, and a minute movement mechanism supporting part 40 supporting the movable part 31 in the minute movement mechanism 20. The minute movement mechanism supporting part 40 is provided with an expansible member 41, which can be expanded/shrunk in the displacement generating direction of the minute movement mechanism 20 and preloads both displacement generating directional ends of the minute movement mechanism 20, and the displacement is carried out in the position in which an action force toward the both ends generated by the minute displacement is canceled not to be transmitted to the minute movement mechanism supporting part 40. When the action force is generated to the expansible member 41 by displacement of the minute movement mechanism 20, a force for displacing the minute movement mechanism 20 and the preloading force are canceled by each other.
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