| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle which has good resistance to a gaseous fluorine laser and does not produce foreign matter. SOLUTION: This pellicle 11 has a box-shaped pellicle frame 13 having apertured top and base surfaces and a pellicle plate 12 bonded to one aperture of the pellicle frame 13. The pellicle frame 13 and the pellicle plate 12 consist of quartz glass and the flanks of the pellicle frame 13 are subjected to etching treatment and have a surface roughness of <=5μm or are subjected to mirror finishing treatment.</p> |
