| 摘要 |
PROBLEM TO BE SOLVED: To smoothly control amount of exhaust. SOLUTION: In a valve element 182, provided in a pressure controller and a flange 100, by forming the flange 100 into flanges 162, 262 with curved surface part having a curved surface, exhausted amount is smoothly controlled. The valve element and the flange are provided with a heating means for substantially preventing reaction gas from depositing and adhering to the valve element and the flange.
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