发明名称 Semiconductor device
摘要 An electrical wiring structure capable of improving a wiring delay to thereby achieve both low power consumption and high-speed performances without accompanying any significant changes in circuit layout and wiring structure of prior known CMOS logic circuitry and also alterations of the multilayer configuration of wiring layers is provided. A local wiring 1 and global wirings 2, 3 are stacked over a semiconductor substrate 10 in this order of sequence when looked at from lower part in a lamination direction, with dielectric layers sandwiched between adjacent ones of these layers. A distance between the local wiring 1 and the global wiring 2 is so formed as to be greater than a distance between the global wiring layer 2 and the global wiring, 3. Thus provided is a semiconductor device featured in that a drive voltage used to drive the global wirings 2, 3 is potentially lower than a drive voltage for driving inside of the local wiring 1.
申请公布号 US2002163063(A1) 申请公布日期 2002.11.07
申请号 US20020188752 申请日期 2002.07.05
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NOGUCHI MITSUHIRO;NISHIYAMA AKIRA
分类号 H01L23/522;(IPC1-7):H01L23/495 主分类号 H01L23/522
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