| 发明名称 |
Device for holding an optical element especially for semiconductor lithography has recesses in lens mount held at reduced pressure |
| 摘要 |
A device for holding an optical element (1), especially for a lens in a semiconductor lithographic system has recesses (5) in the region of the element support on the mount (3) which are maintained at low pressure.
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| 申请公布号 |
DE10121347(A1) |
申请公布日期 |
2002.11.07 |
| 申请号 |
DE20011021347 |
申请日期 |
2001.05.02 |
| 申请人 |
CARL ZEISS |
发明人 |
HOLDERER, HUBERT;HUMMEL, WOLFGANG |
| 分类号 |
G02B7/02;G03F7/20;(IPC1-7):G02B7/02 |
主分类号 |
G02B7/02 |
| 代理机构 |
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代理人 |
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