Tintenstrahldruckkopf und Verfahren zu seiner Herstellung

摘要

A method for manufacturing an ink jet print head having a fluid passage forming substrate 35 including ink supply ports 34 and pressure generating chambers 33 being trapezoidal in shape, each pressure generating chamber 33 having walls substantially parallel to the flowing direction of ink, and no stagnation of ink is present in the pressure generating chambers 33. The pressure generating chambers' 33 walls include first walls vertical to the surface of the silicon monocrystalline substrate and oriented in the orientation of the pressure generating chambers 33, and second walls slanted at an angle of 35 DEG with respect to the surface of the substrate 35, the second walls being formed at both ends of each pressure generating chamber 33. An elastic plate 36 is fastened onto first opening-formed sides of the pressure generating chambers 33 and pressure generating means 31 for expanding and contracting the pressure generating chambers 33 are mounted on the surface of the elastic plate 36. A covering member 37 has nozzle openings 32 each located at the end of each pressure generating chamber 33 which are firmly fastened to second opening-formed sides of the pressure generating chambers 33. The covering member 37 is firmly fastened on the fluid passage forming substrate 35 by an adhesive layer 39. In the etching process for forming the fluid passage forming substrate 35 a first etching pattern to be the pressure generating chambers (33) is wider than and a second etching pattern to be the ink supply ports.