发明名称 METHOD FOR PRODUCING METALLIC BIT LINE CONTACTS
摘要 <p>According to the invention, a contact hole is filled with a metal or a metal alloy when a bit line is brought into contact with a selection transistor of a dynamic memory unit on a semiconductor wafer. The semiconductor substrate in the contact hole comprises a dopant, and a liner layer is integrated between the semiconductor substrate and the metal filling.</p>
申请公布号 WO2002086967(A2) 申请公布日期 2002.10.31
申请号 EP2002004308 申请日期 2002.04.18
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