发明名称 |
Sensor with built-in circuits and pressure detector using the same |
摘要 |
A sensor with built-in circuits can be improved in the stability of the operation or characteristics. A circuit region and a sensor region are covered by a passivation film. The sensor region is partially covered by the passivation film. The sensor region and circuit region are protected by the passivation film, and an effect of the passivation film on the mechanical displacement of a diaphragm portion can be alleviated so that the sensor with built-in circuits may be improved in the stability of the operation or characteristics.
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申请公布号 |
US2002157475(A1) |
申请公布日期 |
2002.10.31 |
申请号 |
US20020173732 |
申请日期 |
2002.06.19 |
申请人 |
HITACHI, LTD. |
发明人 |
ONOSE YASUO;HORIE JUNICHI;KURYU SEIJI;SAITO AKIHIKO;ICHIKAWA NORIO;WATANABE ATSUO;SHIMADA SATOSHI |
分类号 |
G01L9/00;H01L29/84;(IPC1-7):G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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