| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a management method capable of accurately judging any abnormal state in a manufacture process. SOLUTION: In this management method, the data of a plurality of manufacture management parameters under the normal state of a manufacture process are sampled so that first sampling data can be prepared, and a Mahalanobis space for the respective manufacture management parameters is prepared based on the first sampling data, and the data of those manufacture management parameters at the time of operating the manufacture process are sampled in a prescribed cycle so that second sampling data can be prepared. Then, a Mahalanobis distance is calculated from the Mahalanobis space and the second sampling data, and the Mahalanobis distance is compared with a prescribed value so that whether or not the manufacture process is an abnormal state can be judged.</p> |
