| 摘要 |
PROBLEM TO BE SOLVED: To heighten measurement accuracy without raising resolution of an imaging element. SOLUTION: Each illumination area surface of two light sources A1 , A2 separated at a prescribed distance is divided as sub-pixels on each meshed point auv by using the points a1 , a2 respectively as the origins. While illumination positions are moved respectively on each illumination area surface, hologram interference images on each illumination position are inputted continuously by the imaging element, and a surface area (area circle) of a measuring object equivalent to one pixel of the imaging element is operated as a point projected in a tetragonal lattice shape, to thereby determine a point near actual points g1 , g2 ,..., gm on the surface of the measuring object.
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