| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element, having a stable and high piezoelectric characteristics by obtaining a prescribed orientation degree of a piezoelectric film stably and with high reproducibility and provide a method for manufacturing the same. SOLUTION: The method comprises a step (S1) of forming a diaphragm film 30 (31 or 32) on a substrate 20, a step of forming a lower electrode 33 on the film 30, a first step (S2) of forming a Ti layer on the electrode 33, a step of patterning the electrode 33 into a prescribed shape, a second step (S3) of forming a Ti layer on the electrode 33 which remains after patterning and on the film 30 from which the lower electrode is removed, a step (S4) of forming a PZT layer 43 (Pb, Zr, Ti-lead zirconate titanate) on the lower electrode layer on which the Ti layer is formed by the step (S3), and a step (S5) of forming an upper electrode 44 on the layer 43. |
