发明名称 Inspection master block and method of producing the same
摘要 A plurality of fixing holes are made in the upper and side faces of a hollow rectangular prism block body at least the top and four side faces of which are quartz glass or monocrystalline quartz rectangular plates. A plurality of reference members, each having a reference measuring face with which the fore end of a probe of a measuring apparatus is brought into contact, are inserted into the fixing holes, respectively, and secured in place. An inspection master block ensuring a high inspection accuracy by minimizing the effect of ambient temperature variation and a method for producing the same are thereby provided.
申请公布号 US2002157449(A1) 申请公布日期 2002.10.31
申请号 US20020959364 申请日期 2002.01.28
申请人 ASANUMA SUSUMU 发明人 ASANUMA SUSUMU
分类号 G01B1/00;G01B5/00;G01B21/00;G01B21/04;G01B21/20;(IPC1-7):G01B3/30 主分类号 G01B1/00
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