发明名称 Structure and method for fabricating high contrast reflective mirrors
摘要 A high contrast reflective mirror includes a plurality of alternating first monocrystalline layers and second monocrystalline layers. The first monocrystalline layers are formed of an oxide material that has a cubic structure and a first index of refraction. The second monocrystalline layers are formed of a semiconductor material that has a second index of refraction. The first index of refraction and the second index of refraction differ by at least about 0.5
申请公布号 US2002158265(A1) 申请公布日期 2002.10.31
申请号 US20010842735 申请日期 2001.04.26
申请人 MOTOROLA, INC. 发明人 EISENBEISER KURT W.
分类号 H01L33/10;H01L33/46;H01S5/183;(IPC1-7):H01L29/76;H01L33/00 主分类号 H01L33/10
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