发明名称 |
SENSOR CHIP WITH ADDITIONAL HEATING ELEMENT, METHOD FOR PREVENTING A SENSOR CHIP FROM BEING SOILED, AND USE OF AN ADDITIONAL HEATING ELEMENT ON A SENSOR CHIP |
摘要 |
In conventional sensor chips contaminations of a flowing medium can deposit in the area of the sensor and can permanently soil it, resulting in a negative influence on the measuring behavior of the membrane. The inventive sensor chip (1) is characterized in that an additional heating element (39) is provided that is arranged upstream and at a distinct distance to the sensor area. As a result, the contaminations of the flowing medium deposit in the area of the additional heating element (39) and are thus prevented from reaching the sensor area (17). |
申请公布号 |
WO02073140(A3) |
申请公布日期 |
2002.10.31 |
申请号 |
WO2002DE00894 |
申请日期 |
2002.03.13 |
申请人 |
ROBERT BOSCH GMBH;HECHT, HANS;KONZELMANN, UWE;SCHULZ, TORSTEN |
发明人 |
HECHT, HANS;KONZELMANN, UWE;SCHULZ, TORSTEN |
分类号 |
G01F1/68;G01F1/684;G01F1/692;G01F1/696;G01F1/699 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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