发明名称 Method of polishing disks
摘要 A method of preparing for a disk polishing operation includes providing a polishing machine having a first and a second superposed platen. A first polishing pad is on the first platen and a second polishing pad is on the second platen. A plurality of carriers are disposed between the first and second polishing pads. Each carrier is adapted to rotate relative to the polishing pads and is adapted to carry at least one glass disk. A pressure, temperature and rotational speed of the polishing machine used during a disk polishing operation are determined. A number of diamond disks are provided. A diamond disk is placed in respective ones of the carriers. The polishing machine is operated at or near the determined pressure, temperature and rotational speed while simultaneously dressing the respective surfaces of the polishing pads using the diamond disks.
申请公布号 US2002160689(A1) 申请公布日期 2002.10.31
申请号 US20010843832 申请日期 2001.04.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BENNING FREDERICK P.;MAYNARD STEVEN L.;PAURUS DAVID C.;PODOLSKE JON EDWARD
分类号 B24B37/04;B24B53/007;(IPC1-7):B24B7/22 主分类号 B24B37/04
代理机构 代理人
主权项
地址