| 摘要 |
PURPOSE: A method and a device for vapor depositing organic layer are provided to monitor and control formation of organic layers by physical vapor deposition in making organic light-emitting devices. CONSTITUTION: A method for depositing an evaporated or sublimed organic layer onto a structure which forms part of an organic light-emitting device(10) comprises a steps of depositing at a deposition zone organic material forming a layer of the organic light-emitting device, a steps of providing a movable sensor which, when moved into the deposition zone and is being coated during the depositing step, provides a signal representing the thickness of the organic material forming the layer, a steps of controlling the deposition of the organic material in response to the signal to control a deposition rate and thickness of the organic layer formed on the structure, a steps of moving the movable sensor from the deposition zone to a cleaning position, and a steps of removing organic material from the movable sensor to permit reuse of the movable sensor.
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