发明名称 Turbo-molecular pump
摘要 Pump has rotor (4) and stator (6) plates arranged alternately in series and distance rings (8) for stator plates forming stator packet with stator plates. An elastically deformable metal element (16) is arranged between at least two of distance rings and forms part of stator packet. An axial groove (14) machined into at least no distance ring accommodates an elastically deformable metal element.
申请公布号 EP1130269(A3) 申请公布日期 2002.10.30
申请号 EP20010102551 申请日期 2001.02.06
申请人 PFEIFFER VACUUM GMBH 发明人 FAHRENBACH, PETER;BLECKER, ARMIN;BREMER, WOLFGANG
分类号 F04D19/04;F04D29/64 主分类号 F04D19/04
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