发明名称 SUPER-VIBRATION WASHING METHOD AND APPARATUS THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a super-vibration washing method capable of effectively washing an article to be washed without damaging the article to be washed and being largely affected by the kind of foreign matter, and a washing apparatus therefor. SOLUTION: The article to be washed can be washed without being damaged to remove the foreign matter bonded to the article to be washed by three- dimensional turblent flows generated by subjecting a washing liquid 7 containing a surfactant to low frequency vibration of 10-60 Hz in order to remove the foreign matter bonded to the article to be washed. In order to generate low frequency waves, a washing tank 8 provided with multistage fins 2 and a washing apparatus having a super-vibration generation source 1 connected to the fins 2 and capable of controlling frequency and a washing time are used. The washing apparatus utilizing a super-vibration stirring means has a heater 3 in the washing tank to control temperature.
申请公布号 JP2002316109(A) 申请公布日期 2002.10.29
申请号 JP20010118770 申请日期 2001.04.17
申请人 SEIKO EPSON CORP 发明人 SONEHARA CHIHIRO;KOMATSU HIROSHI
分类号 B08B3/12;H01L21/304;(IPC1-7):B08B3/12 主分类号 B08B3/12
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