发明名称 |
Antihalation compositions |
摘要 |
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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申请公布号 |
US6472128(B2) |
申请公布日期 |
2002.10.29 |
申请号 |
US20010924045 |
申请日期 |
2001.08.07 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
THACKERAY JAMES W.;ORSULA GEORGE W. |
分类号 |
C08F2/50;G03F7/09;(IPC1-7):G03F7/00 |
主分类号 |
C08F2/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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