| 摘要 |
PROBLEM TO BE SOLVED: To prevent complication in manufacturing process and cost rising. SOLUTION: The method comprises a process (Fig. 2 (b), (c)) wherein resin 101 at the side of an electrode 111 of resin 102 applied on a photoelectric conversion element 109 and the electrode 111 via insulation layers 103, 105 is removed and resin at a photoelectric conversion element side is processed to a lens shape and a micro lens is formed, and a process (Fig. 2 (d) to (g)) wherein a reflection preventive film 101 is formed in a surface of a resist 112 and a micro lens 102' with a surface of the electrode 111 which is exposed by removing the insulation layers 103, 105 on the electrode 111 and covered with the resist 112, and thereafter the resist 112 is removed.
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