| 摘要 |
PROBLEM TO BE SOLVED: To increase the density of a plasma in surface treating equipment. SOLUTION: A coaxial magnet set 11 is constituted of a columnar central magnet 11b and a cylindrical peripheral magnet 11c which is arranged so as to have reverse polarity to the magnet 11b. In a counter electrode 2, a large number of the coaxial magnet sets 11 are arranged. Thereby high density plasma is generated uniformly on the periphery of the counter electrode 2, and a magnetic field on a substrate 4 is made almost negligible. |
