| 摘要 |
PROBLEM TO BE SOLVED: To solve problems that temperature sensors provided for respective zones receive heat of adjacent zones and a temperature cannot be accurately measured and thereby temperature control in the respective zones is inaccurate in a conventional plate heater wherein a heat generation part is divided into the plural zones and the temperature sensor such as a thermocouple (T/C) respectively provided on the respective zones is connected to a temperature controller so as to respectively control the temperature for the respective zones. SOLUTION: In this plate heater, an inside zone heat generating part and an outside zone heat generating part are separated from each other in a predetermined distance so as to prevent influence of heat of the adjacent zone, and an individual cooling means is provided for the respective zone heat generating parts. The cooling means is constituted by a cooling plate having a groove and a means for introducing a refrigerant into the groove.
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