| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge exposure system that can perform good exposure on the edge of a substrate by exposing the edge to the light having a uniform intensity distribution. SOLUTION: The light from a light source unit 31 is made incident to an optical mixing element 34 through a first light guide 33 made of 500 optical fibers. In the optical element 34, the light rays emitted from the optical fibers are mixed (optically mixed) with each other and the light emitted from the light-emitting surface 34a of the element 34 has a nearly uniform intensity distribution. The emitted light having the intensity distribution is introduced to an irradiation head 32 through a second light guide 35 composed of 500 optical fibers and projected upon the edge of the substrate W.
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