| 摘要 |
PROBLEM TO BE SOLVED: To provide organic metal vapor growth equipment wherein the cost can be reduced and productivity can be increased without deteriorating the quality of products. SOLUTION: This organic metal vapor growth equipment is provided with organic metal material gas supplying sources 1-3, a material gas supply means 5 for introducing organic metal material gas from the supply sources 1-3, and a plurality of reactors 7, 8 wherein a film is formed by organic metal vapor growth using the organic metal material gas from the supply means 5. The supply means 5 is constituted in such a manner that the organic metal material gas can be divided and supplied to the reactors 7, 8.
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