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发明名称
Präzisionsreplikation mittels chemischer Dampfphasenabscheidung
摘要
申请公布号
DE69902967(D1)
申请公布日期
2002.10.24
申请号
DE19996002967
申请日期
1999.04.29
申请人
CVD INC., WOBURN
发明人
GOELA, JITENDRA SINGH
分类号
C23C16/00;C23C16/01;C23C16/02;(IPC1-7):C23C16/02;C23C16/30;C23C16/44
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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