| 发明名称 |
Polishing pads and methods relating thereto |
| 摘要 |
Polishing pads are provided having a polishing surface formed from a material. The polishing surface has a topography produced by a thermoforming process. The topography consists of large and small features that facilitate the flow of polishing fluid and facilitate smoothing and planarizing.
|
| 申请公布号 |
US2002155801(A1) |
申请公布日期 |
2002.10.24 |
| 申请号 |
US20020137056 |
申请日期 |
2002.05.01 |
| 申请人 |
ROBERTS JOHN V.H.;JAMES DAVID B.;COOK LEE MELBOURNE;JENKINS CHARLES W. |
发明人 |
ROBERTS JOHN V.H.;JAMES DAVID B.;COOK LEE MELBOURNE;JENKINS CHARLES W. |
| 分类号 |
B24B37/04;B24B41/047;B24D3/26;B24D3/28;B24D13/12;B24D13/14;(IPC1-7):B24D11/00 |
主分类号 |
B24B37/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
